4.6 Article

Enhanced Sensitivity of GaN-Based Temperature Sensor by Using the Series Schottky Barrier Diode Structure

Journal

IEEE ELECTRON DEVICE LETTERS
Volume 41, Issue 4, Pages 601-604

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LED.2020.2971263

Keywords

Gallium nitride; series diode; TiN anode; temperature sensor

Funding

  1. National Key Research and Development Program [2017YFB0403000]
  2. Fundamental Research Funds for The Centered Universities [18lgpy22]
  3. National Natural Science Foundation of China [61904207]

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Temperature sensor using series GaN Schottky barrier diode (SBD) with TiN anode was fabricated and evaluated extensively. The diode presents good characteristics in a wide temperature range from 25 degrees C to 200 degrees C. The temperature dependent forward voltage of the conventional 8-finger SBD at a fixed current shows good linearity, resulting in a sensitivity of approximately 1.14 mV/K. On the other hand, the series SBD with two 8-finger diodes enhances the sensitivity by nearly two times. The enhancement in temperature sensitivity is interpreted using a series model, with the obtained parameters are comparable with the 8-finger SBD.

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