Journal
APPLIED SURFACE SCIENCE
Volume 509, Issue -, Pages -Publisher
ELSEVIER
DOI: 10.1016/j.apsusc.2020.145304
Keywords
Surface oxidation layer; Residual stress; FePt; (001) preferred orientation; Pressure; Rapid thermal annealing
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The dependence of annealing pressure and background pressure during film deposition on the in-plane residual tensile stress, the crystallographic orientation and the surface chemical state in single-layer FePt films formed with rapid thermal annealing were investigated. On manipulating the annealing pressure and background pressure, the transition from perpendicular magnetic anisotropy to isotropy was found in the rapidly annealed FePt films. The slight surface oxidation of the FePt films during rapid thermal annealing induced an in-plane tensile stress to develop the (0 0 1)-texture and a perpendicular magnetic anisotropy. In contrast, for FePt films prepared at low pressure, the accumulated in-plane tensile stress was insufficient to develop a well aligned (0 0 1)-texture because of a lack of stress induced by a surface oxidation layer.
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