Journal
PHOTONICS RESEARCH
Volume 8, Issue 4, Pages 610-615Publisher
OPTICAL SOC AMER
DOI: 10.1364/PRJ.384508
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Funding
- National Key Research and Development Program of China [2017YFE0100300]
- Science Challenge Project [TZ2016003]
- National Natural Science Foundation of China [61734001, 61521004, 61774004]
- Deutsche Forschungsgemeinschaft (Research Instrumentation Program) [INST272/148-1]
- Deutsche Forschungsgemeinschaft (Collaborative Research Center) [SFB 787]
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Investigating closely stacked GaN/AlN multiple quantum wells (MQWs) by means of cathodoluminescence spectroscopy directly performed in a scanning transmission electron microscope, we have reached an ultimate spatial resolution of sigma(CL) = 1.8 nm. The pseudomorphically grown MQWs with high interface quality emit in the deep ultraviolet spectral range. Demonstrating the capability of resolving the 10.8 nm separated, ultra-thin quantum wells, a cathodoluminescence profile was taken across individual ones. Applying a diffusion model of excitons generated by a Gaussian-broadened electron probe, the spatial resolution of cathodoluminescence down to the free exciton Bohr radius scale has been determined. (c) 2020 Chinese Laser Press
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