4.3 Article

Multifitting: software for the reflectometric reconstruction of multilayer nanofilms

Journal

JOURNAL OF APPLIED CRYSTALLOGRAPHY
Volume 53, Issue -, Pages 244-252

Publisher

INT UNION CRYSTALLOGRAPHY
DOI: 10.1107/S160057671901584X

Keywords

X-ray reflectometry; software; inverse problem; model structural reconstruction; multilayers

Funding

  1. Russian Foundation for Basic Research (RFBR) [0035-2014-0204]
  2. [18-32-00173]

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Multifitting is a computer program designed specifically for modeling the optical properties (reflection, transmission, absorption) of multilayer films consisting of an arbitrary number of layers in a wide range of wavelengths. Multifitting allows a user to calculate the reflectometric curves for a given structure (direct problem) and to find the parameters of the films from the experimentally obtained curves (inverse problem), either manually or automatically. Key features of Multifitting are the ability to work simultaneously with an arbitrary number of experimental curves and an ergonomic graphical user interface that is designed for intensive daily use in the diagnosis of thin films. Multifitting is positioned by the author as the successor to the IMD program, which has become the standard tool in research and technology groups synthesizing and studying thin-film coatings.

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