Journal
APPLIED SCIENCES-BASEL
Volume 9, Issue 24, Pages -Publisher
MDPI
DOI: 10.3390/app9245484
Keywords
microfluidic; doppler; laser sensing; integrated microoptics; micro-nano; technology; VCSEL; laser beam shaping
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Funding
- Agence Nationale de la Recherche (ANR) [ANR-15-CE19-0012 DOCT-VCSEL]
- China Scholarship Council (CSC)
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Using the optical feedback interferometry (OFI) technique, we demonstrated a miniaturized and compact sensor system based on a dedicated optical source for flowmetry at the micro-scale. In the system, polymer microlenses were integrated directly on a VCSEL (vertical-cavity surface-emitting laser) chip and the microfluidic channel chip surface using polymer-based micro-fabrication technologies. In particular, at a post-process stage, we integrated a collimation lens on a VCSEL chip of small dimensions (200 mu m x 200 mu m x 150 mu m). This process was enabled by the soft-printing of dry thick resist films and through direct laser writing technology. We performed flow rate measurements using this new compact system, with a conventional bulk glass lens configuration for system performance evaluation. A maximum 33 dB signal-to-noise ratio was achieved from this novel ultra-compact system. To our knowledge, this is the highest signal level achieved by existing OFI based flowmetry sensors.
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