Journal
MICROMACHINES
Volume 10, Issue 12, Pages -Publisher
MDPI
DOI: 10.3390/mi10120877
Keywords
MEMS; infrared detector; thermopile; etch-stop
Categories
Funding
- National Natural Science Foundation of China [61401458, 61335008, 61136006, 51205373]
- Jiangsu Natural Science Foundation [BK20131098]
- Shanxi Natural Science Foundation [201801D121157, 201801D221203]
- Scientific and Technological Innovation Programs of Higher Education Institutions in Shanxi [1810600108MZ]
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This paper presents a high-performance micro-electromechanical systems (MEMS) thermopile infrared detector. It consists of a double-end beam and a dual-layer thermocouple structure, which improves the responsivity of the detector. The etch-stop structure is integrated into the detector to prevent isotropic etching-caused damage on the device. The responsivity of the detector achieved 1151.14 V/W, and the measured response time was 14.46 ms. The detector had the potential to work as a high-precision temperature sensor and as a vacuum sensor.
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