A novel high performance integrated two-axis inchworm piezoelectric motor

In all of the actuating mechanisms for the precision positioning systems such as compliant, inertial, ultrasonic and inchworm, the lack of an integrated precision positioning system with high stroke and multi-axis operation is felt. In this paper, a state-of-the-art integrated two-axis inchworm piezomotor with an innovative operating principle is proposed. This piezomotor consists of two stages that are integrated, and each one delivers continuous motion in one-axis. Each of the stages consists of three actuating parts: two clamping actuators to engage/disengage with the guideway or frame (depend on the stage), and one feeder actuator to provide the step-by-step motion. The mode shapes and Von Mises stress distribution for each stage are analyzed by using the finite element analysis method. The performance of each stage is then verified throughout the experimental tests. The experimental tests are carried out to realize the two-axis piezomotor characteristics such as step pitch, resolution, axial speed, bearing capacity, and operating frequency in each stage.