Journal
PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS
Volume 257, Issue 7, Pages -Publisher
WILEY-V C H VERLAG GMBH
DOI: 10.1002/pssb.201900626
Keywords
combinatorial material synthesis; continuous composition spread-pulsed-laser deposition; material library; offset pulsed-laser deposition; pulsed-laser deposition; vertical continuous composition spread-pulsed-laser deposition
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Funding
- Deutsche Forschungsgemeinschaft (DFG, German Research Foundation) [31047526-SFB 762]
- European Social Fund within the Young Investigator Group Oxide Heterostructures [SAB 100310460]
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Combinatorial material synthesis has led to a significant acceleration in the optimization of multinary compounds and a more efficient usage of source and substrate materials. Various growth methods, including physical vapor deposition, can be adopted to realize material libraries. Herein, two approaches to combinatorial material synthesis based on ablation of segmented targets during pulsed-laser deposition are reviewed. For these two processes, either laterally or radially segmented targets are utilized and allow the creation of lateral and vertical composition spreads, respectively. Radially segmented targets can additionally be used to synthesize a discrete binary material library. Both approaches are introduced by calculating the expected material distribution with a simple geometric plasma expansion model. Then, experimentally determined elemental distributions and growth rates are compared to predictions and it is demonstrated that differences between calculated and experimental data contain vital information on the influence of, for example, thermodynamic processes on the growth mechanism.
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