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Hybrid Passivation for Foldable Indium Gallium Zinc Oxide Thin-Film Transistors Mediated by Low-Temperature and Low-Damage Parylene-C/Atomic Layer Deposition-AlOx Coating

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE (2020)

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Hybrid Passivation for Foldable Indium Gallium Zinc Oxide Thin-Film Transistors Mediated by Low-Temperature and Low-Damage Parylene-C/Atomic Layer Deposition-AlOx Coating

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