Journal
OPTICS LETTERS
Volume 45, Issue 3, Pages 787-790Publisher
OPTICAL SOC AMER
DOI: 10.1364/OL.385222
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Funding
- National Natural Science Foundation of China [61575050, 61905048, 61935006]
- Fundamental Research Funds for the Central Universities [HEUCFG201841]
- Natural Science Foundation of Heilongjiang Province [ZD2016012]
- Open Fund of the State Key Laboratory on Integrated Optoelectronics [IOSKL2016KF03]
- 111 Project [B13015]
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We propose and demonstrate a miniature Fabry-Perot interferometer (FPI) based on a movable microsphere reflector. The movable microsphere acts as a good reflector, with the reflections occurring at the spliced single-mode fiber/hollow-core fiber interface and the surface of a microsphere, resulting in two-beam interference. The silica microsphere is formed at the tip of a half-tapered optical fiber, and its diameter can be reduced to miniaturize the FPI. The movable microsphere interferometer exhibits a highly linear response to external displacement change, and a high displacement sensitivity of 11.9 pm/nm with a nanoscale resolution of 1.7 nm is achieved. Wide-range displacement can also be measured by monitoring the changes in the free spectral range of the reflection spectrum. Therefore, this miniaturized FPI may find use in applications in nano-displacement measurement fields, and the concept of a movable microsphere reflector is of great significance for the miniaturization of micro-photonic devices. (C) 2020 Optical Society of America
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