Journal
OPTICS EXPRESS
Volume 28, Issue 2, Pages 1539-1553Publisher
OPTICAL SOC AMER
DOI: 10.1364/OE.380383
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Funding
- Horizon 2020 Framework Programme [675745]
- Bundesministerium fur Bildung und Forschung [FKZ 03Z1H534, FKZ 03ZZ0434, FKZ 03ZZ0451]
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Optically resonant high-index dielectric metasurfaces featuring Mie-type electric and magnetic resonances are usually fabricated by means of planar technologies, which limit the degrees of freedom in tunability and scalability of the fabricated systems. Therefore, we propose a complimentary post-processing technique based on ultrashort (<= 10 ps) laser pulses. The process involves thermal effects: crystallization and reshaping, while the heat is localized by a high-precision positioning of the focused laser beam. Moreover, for the first time, the resonant behavior of dielectric metasurface elements is exploited to engineer a specific absorption profile, which leads to a spatially-selective heating and a customized modification. Such technique has the potential to reduce the complexity in the fabrication of non-uniform metasurface-based optical elements. Two distinct cases, a spatial pixelation of a large-scale metasurface and a height modification of metasurface elements, are explicitly demonstrated. (C) 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
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