Journal
MEASUREMENT
Volume 151, Issue -, Pages -Publisher
ELSEVIER SCI LTD
DOI: 10.1016/j.measurement.2019.107090
Keywords
Pressure metrology; Vacuum standard; Quantum pascal; Optical pressure measurement; Refractometry, Fabry-Perot
Funding
- JSPE KAKENHI [JP18K13771]
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Optical pressure measurement systems can precisely measure pressure from vacuum to high pressure with a single apparatus. However, the continuously measurable range without interrupting measurement is limited to less than 1 kPa. In this study, an optical pressure measurement system with a wide continuous measurable range was developed. The optical system can continuously measure a pressure range of 18 kPa when using nitrogen gas by using a Littrow external cavity diode laser as its light source. First, discrete pressure points from vacuum to atmospheric pressure were measured. The repeatability and non-linearity of the differences between the measured values had standard deviations of 0.1 Pa and 0.5 Pa, respectively. Next, a pressure range from 91 kPa to 109 kPa was continuously measured. The results showed that the linearity characteristics of gauges as a function of pressure can be evaluated precisely using our optical pressure measurement system. (C) 2019 Elsevier Ltd. All rights reserved.
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