Journal
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 105, Issue -, Pages -Publisher
ELSEVIER SCI LTD
DOI: 10.1016/j.mssp.2019.104736
Keywords
ZnO nanorod arrays; EBL; Hydrothermal; Physical confinement; PMMA template; ZnO seed layer
Categories
Funding
- National Electronics and Computer Technology Center [P1851099]
- Science Achievement Scholarship of Thailand - Office of the Higher Education Commission (OHEC), Ministry of Education, Thailand
- Erasmus mundus programme
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This paper demonstrates a fabrication approach to control size distribution of zinc oxide nanorod arrays (ZnO NRAs) when using a polycrystalline seed layer. Through perfect matching between a physical confinement using a periodic PMMA template and a chemical confinement via hydrothermal method, highly ordered ZnO NRAs are accomplished. This matching relies on the restricted nucleation sites where the seed layer's grain size as well as number of grains along the template's aperture become dominant factors. In the experiment, various dimensions of periodic templates and precursor concentrations were carried on. The optimum condition shows single-ZnO NR arrays with good uniformity. Multiple rod array appears in the template with larger holes' dimension as it allows multiple nucleation sites to be formed. The effect of spacing between holes in the template is also included. The results demonstrate an effective and cost-effective way for tailoring uniformity of single ZnO NRAs on the polycrystalline seed layer.
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