Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 29, Issue 1, Pages 3-13Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2019.2958427
Keywords
Resonant accelerometer; mode localization; series-parallel; electromechanically coupled resonator; sensitivity-tuning
Categories
Funding
- National Science Foundation for Distinguished Young Scholars [11625208]
- Program of Shanghai Academic/Technology Research Leader [19XD1421600]
- National Nature Science Foundation of China [11802173]
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This paper reports a novel mode-localized resonant accelerometer, which can keep high sensitivity even over a wide range. To improve the adjustability of sensitivity, a new four degree of freedom (4-DoF) series-parallel resonator array is proposed. Three sensing resonators are mechanically coupled together in series by folding beams and the fourth sensitivity-tuning resonator is electrically coupled in parallel with the sensing system. When the stiffness perturbation caused by acceleration occurs, a change of modal amplitude ratio due to the mode localization phenomenon can be detected. By tuning the voltage on the sensitivity-tuning resonator, the sensitivity of the accelerometer can be altered to keep the amplitude ratio within a reasonable range. The theoretical model of the accelerometer is established and analyzed by numerical method. To confirm the feasibility of the design, a device fabricated by SOI-MEMS technology is tested under open-loop circuit. The measured amplitude ratio sensitivity varies from 1.14/g to 23.37/g with the change of the tuning voltage, and the sensitivity adjustment range reaches 2050%. [2019-0199]
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