Journal
INFRARED PHYSICS & TECHNOLOGY
Volume 105, Issue -, Pages -Publisher
ELSEVIER
DOI: 10.1016/j.infrared.2020.103241
Keywords
Residual stress controlling; THz micro-bolometer; Design; Fabrication
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Funding
- National Natural Science Foundation of China [NSFC 61377063]
- Sichuan Science and Technology Program [2018TZDZX0008]
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Control of the residual film stress to the desired levels is critical for the design and fabrication of high-quality micro-bolometers for terahertz (THz) detectors. In this work, a stress equivalent method was employed to investigate the deformations of the suspended mull-layer micro-bolometers. According to the orthogonal calculation results obtained by a design of experiment (DOE) method, the optimal residual stress for each layer was simulated, by which high-quality micro-bolometers with low deformation were designed. Furthermore, 384 x 288 THz focal plane arrays constructed by the as-designed micro-bolometers were successfully fabricated. Particularly, the as-fabricated micro-bolometers have uniform morphologies, smooth surfaces, low deformations of 0.063 mu m, all of which are accordance with the simulated results and suggest suitable applications of the designed micro-bolometers in THz detecting.
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