Journal
IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS
Volume 67, Issue 3, Pages 2430-2439Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TIE.2019.2902792
Keywords
Imaging; Field programmable gate arrays; Real-time systems; Force; Bandwidth; Resonant frequency; Surfaces; Atomic force microscope; field-programmable gate array (FPGA); iterative learning control (ILC); robust controller; sinusoidal scan
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Funding
- National Key Research and Development Programme of China [2017YFA0207201]
- National Natural Science Foundation of China [61573121]
- Beijing Advanced Innovation Center for Intelligent Robots and Systems [2018IRS02]
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This paper presents a method that combines a robust controller (H $_{\infty }$ ) and an iterative learning controller (ILC) to control a low mechanical bandwidth nanopositioning stage for high-speed atomic force microscopy imaging. In conventional scanning configurations, the imaging speed of a low-resonance frequency scanner is limited to a few Hz. However, the images obtained using the proposed method have no obvious anamorphosis with a scan speed of up to 80 Hz. This method uses a sinusoidal scanning mode in the fast-scan axis, which effectively reduces the mechanical vibration of the XY-scanner and improves the imaging bandwidth. In addition, a compact high-bandwidth Z-scanner configured with a symmetrical dual-actuator was developed to replace the Z-axis of the nanopositioning stage for high-speed tracking of the sample topography. To further improve the imaging performance, an ILC is designed to suppress the nonlinear behavior of piezoelectric and reduce the tracking error. In addition, a model-based H $_{\infty }$ is designed to reduce the measurement error and enhance the image quality. All algorithms and real-time control are implemented with a field-programmable gate array platform. The experimental results demonstrated that these configurations exhibit significant performance improvements by comparison with conventional scanning modes.
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