Journal
IEEE SENSORS JOURNAL
Volume 20, Issue 4, Pages 1778-1785Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSEN.2019.2950495
Keywords
Resonant frequency; Gas detectors; Heating systems; Thermal conductivity; Gases; Conductivity; Gas sensor; multimode; buckling point; heated microbeam
Funding
- King Abdullah University of Science and Technology (KAUST)
Ask authors/readers for more resources
We report a new gas sensing technique based on the simultaneous tracking of multiple modes of vibration of an electrothermally heated bridge resonator operated near the buckling point. The proposed technique maximizes the sensitivity of the sensor to changes in gases concentrations. We demonstrate a 200& x0025; frequency shift in contrast to 0.5& x0025; resistance change using the conventional resistive technique. The method also demonstrates selective identification for some gases without the need for surface functionalization of the microstructure. The proposed method is simple in principle and design and is promising for achieving practical low-cost gas sensors.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available