Journal
APPLIED SURFACE SCIENCE
Volume 503, Issue -, Pages -Publisher
ELSEVIER
DOI: 10.1016/j.apsusc.2019.144273
Keywords
Fluorine-doped; MgZnO thin films; RF magnetron co-sputtering; Post annealing
Categories
Funding
- National High Technology Research and Development Program of China [2015AA050610]
- Fundamental Research Funds for Central Universities, China [YJ201722]
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Fluorine-doped Mg0.21Zn0.79O (MZO:F) thin films were successfully deposited on glass substrates at room temperature by radio frequency (RF) magnetron co-sputtering method with Mg0.21Zn0.79O, MgF2, and ZnF2 targets. Low resistivity (1.26 x 10(-1) Omega.cm), high Hall mobility (3.55 cm(2)/Vs) and high carrier concentration 1.39 X 10(-19) cm(-3)) were simultaneously realized in the annealed MZO:F film. The effects of doping con- centration and annealing temperature on the structural, morphological, electronic, electrical and optical properties of MZO:F films were systematically investigated in this study. XRD and XPS analysis confirmed that F atoms have entered into crystal lattices of MZO and acted as donors when they occupied O sites in the hexagonal lattice. Moreover, it was observed that both doping concentration and annealing temperature greatly affected the crystallinity, grain size, growth orientation and surface morphology of the MZO:F thin films. In addition, the optical gap changed dramatically with the F content and annealing temperature, which could be attribute to the Burstein-Moss effect accompanied by the effects of fluctuating potential arising from the randomly situated impurities.
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