4.8 Article

How Clean Is Clean? Recipes for van der Waals Heterostructure Cleanliness Assessment

Journal

ACS APPLIED MATERIALS & INTERFACES
Volume 12, Issue 6, Pages 7701-7709

Publisher

AMER CHEMICAL SOC
DOI: 10.1021/acsami.9b18821

Keywords

van der Waals heterostructures; organic residues; contaminant visualization; photoluminescence; solvent diffusion

Funding

  1. Elemental Strategy Initiative
  2. CREST, JST [JPMJCR1SF3]
  3. [IBS-R011-D1]
  4. National Research Foundation of Korea [IBS-R011-D1-2020-A00] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)

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Van der Waals (vdW) heterostructures, artificial stacks of two-dimensional materials, present an exciting platform to explore new physical phenomena and unique applications. An important and increasingly recognized factor limiting the electrical and optical performance of heterostructure samples is the presence of interfacial contamination. In published work reporting various heterostructure fabrication methods, evidence for the cleanliness of samples is often presented as optical and atomic force microscopy images, typically exhibiting a completely flat topography. In this work, we demonstrate that such samples may nonetheless contain a uniformly thin layer of contaminants at the heterostructure interface. As alternatives, we propose two robust visualization methods that are highly sensitive to such residues, based on photoluminescence mapping and on selective solvent diffusion. The detection capability and straightforward implementation of these two imaging techniques make them powerful tools to assess and improve the cleanliness of a wide variety of fabrication techniques for heterostructures comprising any combination of vdW materials.

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