Journal
MATERIALS RESEARCH EXPRESS
Volume 6, Issue 11, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/2053-1591/ab5122
Keywords
TiAlSiN nanocomposite coatings; deep oscillation magnetron sputtering; scratch response; tribological properties
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Funding
- State Scholarship Fund - China Scholarship Council
- 2020 Mengya talent plan - Beijing Academy of Science and technology
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TiAlSiN nanocomposite coatings were deposited using deep oscillation magnetron sputtering with various nitrogen flow ratio (f(N2)) of 0%?20%. The increase of f(N2) promotes phase separation from a single crystallographic TiAlSi to nc-(Ti,Al)N/a-Si3N4 phase. The introduce of N content leads to the formation of refined grain size, smooth morphologies and dense microstructure. Ti0.15Al0.39Si0.07N0.39 coatings with (Al;+;Si)/Ti ratio of 2.9 deposited at f(N2);=;10% reach the highest hardness of 32.8 GPa, H/E* of and 0.0837 and H-3/E*(2) of 0.23. The introduce of N leads to failure mode changing from brittle tensile cracking (through-thickness cracking) to buckle spallation (interfacial failure). Ti0.15Al0.39Si0.07N0.39 coatings with highest H, H/E* and H-3/E*(2) ratios show buckling failure with high L-C1 of 25.4 N and L-C3 of 43.6 N. Correspondingly, Ti0.15Al0.39Si0.07N0.39 coatings are subjected to oxidation wear with low coefficient of friction of 0.41 and specific wear rate of 0.39;;10(?6) mm(3) N-?1 m(?1).
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