Journal
SCIENTIFIC REPORTS
Volume 9, Issue -, Pages -Publisher
NATURE PORTFOLIO
DOI: 10.1038/s41598-019-51970-8
Keywords
-
Categories
Funding
- European Commission project GREENDIAMOND
- H2020 Large Project [SEP-210184415]
- UK's Engineering and Physical Research Council (EPSRC) [EP/H020055/1]
- EPSRC
- EPSRC [EP/H020055/1] Funding Source: UKRI
Ask authors/readers for more resources
To exploit the exceptional properties of diamond, new high quality fabrication techniques are needed to produce high performing devices. Etching and patterning diamond to depths beyond one micron has proven challenging due to the hardness and chemical resistance of diamond. A new cyclic Ar/O-2 - Ar/Cl-2 ICP RIE process has been developed to address micromasking issues from the aluminium mask by optimising the proportion of O-2 in the plasma and introducing a preferential cleaning step. High quality smooth features up to, but not limited to, 10.6 mu m were produced with an average etched surface roughness of 0.47 nm at a diamond etch rate of 45 nm/min and 16.9:1 selectivity.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available