4.8 Article

Dynamic modulation of modal coupling in microelectromechanical gyroscopic ring resonators

Journal

NATURE COMMUNICATIONS
Volume 10, Issue -, Pages -

Publisher

NATURE PUBLISHING GROUP
DOI: 10.1038/s41467-019-12796-0

Keywords

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Funding

  1. National Key R&D Program of China (NKPs) [2018YFB2002304]
  2. National Natural Science Foundation of China (NSFC) [51905539, 51575521, 51705527]
  3. NSF as part of the National Nanotechnology Coordinated Infrastructure [ECCS-1542152]
  4. Defense Advanced Research Projects Agency Precise Robust Inertial Guidance for Munitions (PRIGM) Program
  5. NSF [CMMI-1662464]
  6. UK Natural Environment Research Council [NE/N012097/1]
  7. EPSRC [EP/I019308/1, EP/N021614/1, EP/K000314/1, EP/L010917/1] Funding Source: UKRI
  8. NERC [NE/N012097/1] Funding Source: UKRI

Ask authors/readers for more resources

Understanding and controlling modal coupling in micro/nanomechanical devices is integral to the design of high-accuracy timing references and inertial sensors. However, insight into specific physical mechanisms underlying modal coupling, and the ability to tune such interactions is limited. Here, we demonstrate that tuneable mode coupling can be achieved in capacitive microelectromechanical devices with dynamic electrostatic fields enabling strong coupling between otherwise uncoupled modes. A vacuum-sealed microelectromechanical silicon ring resonator is employed in this work, with relevance to the gyroscopic lateral modes of vibration. It is shown that a parametric pumping scheme can be implemented through capacitive electrodes surrounding the device that allows for the mode coupling strength to be dynamically tuned, as well as allowing greater flexibility in the control of the coupling stiffness. Electrostatic pump based sideband coupling is demonstrated, and compared to conventional strain-mediated sideband operations. Electrostatic coupling is shown to be very efficient, enabling strong, tunable dynamical coupling.

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