Journal
NATURE COMMUNICATIONS
Volume 10, Issue -, Pages -Publisher
NATURE RESEARCH
DOI: 10.1038/s41467-019-11598-8
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Funding
- Samsung Electronics
- NASA Early Stage Innovations (ESI) [80NSSC19K0213]
- Kavli Nanoscience Institute (KNI)
- Ministry of Science and Technology, Taiwan [108-2112-M-006-021-MY3, 107-2923-M-001-010-MY3, 107-2923-M-006-004-MY3]
- Higher Education Sprout Project, Ministry of Education
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Tunable metasurfaces enable dynamical control of the key constitutive properties of light at a subwavelength scale. To date, electrically tunable metasurfaces at near-infrared wavelengths have been realized using free carrier modulation, and switching of thermo-optical, liquid crystal and phase change media. However, the highest performance and lowest loss discrete optoelectronic modulators exploit the electro-optic effect in multiple-quantum-well hetero-structures. Here, we report an all-dielectric active metasurface based on electro-optically tunable III-V multiple-quantum-wells patterned into subwavelength elements that each supports a hybrid Mie-guided mode resonance. The quantum-confined Stark effect actively modulates this volumetric hybrid resonance, and we observe a relative reflectance modulation of 270% and a phase shift from 0 degrees to similar to 70 degrees. Additionally, we demonstrate beam steering by applying an electrical bias to each element to actively change the metasurface period, an approach that can also realize tunable metalenses, active polarizers, and flat spatial light modulators.
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