High-Q microresonators integrated with microheaters on a 3C-SiC-on-insulator platform

We demonstrate, to the best of our knowledge, the first thermally reconfigurable high-Q silicon carbide (SiC) microring resonators with integrated microheaters on a 3C-SiC-on-insulator platform. We extract a thermo-optic coefficient of around 2.67 x 10(-5)/K for 3C-SiC from wavelength shift of a resonator heated by a hot plate. Finally, we fabricate a 40-pm-radius microring resonator with intrinsic Q of 139,000 at infrared wavelengths (similar to 1550 nm) after integration with a NiCr microheater. By applying current through the microheater, a resonance shift of 30 pm/mW is achieved in the microring, corresponding to similar to 50 mW per pi phase shift. This platform offers an easy and reliable way for integration with electronic devices as well as great potential for diverse integrated optics applications. (C) 2019 Optical Society of America