Journal
OPTICAL MATERIALS
Volume 96, Issue -, Pages -Publisher
ELSEVIER
DOI: 10.1016/j.optmat.2019.109223
Keywords
Ga2O3; Ti doping; Optical constants; Spectroscopic ellipsometry
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Funding
- National Science Foundation
- NSF-PREM grant [DMR-1827745]
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This study explores the effect of titanium (Ti) doping on the optical constants of nanocrystalline gallium oxide (Ga2O3) films (GTO). Co-sputtering of the Ga2O3 and Ti targets with a variable sputtering power to Ti allowed the fabrication of GTO films with a variable Ti-content from 0 to similar to 5 at%. The optical constants, namely index of refraction (n) and extinction coefficient (k), and their dispersion profiles determined indicate that the n profiles are sensitive the Ti content while all the GTO films were transparent. The n values at 632 nm varies in the range of 1.78-1.84 due to gradual increase of Ti concentration from 0 to 5%. Lorentz-Lorenz analysis of the optical constants data indicates the gradual improvement in the packing density coupled with structural transformation accounts for the observed optical quality of the Ti-doped Ga2O3 films as a function of Ti concentration. A correlation between the material composition, Ti concentration and optical constants is discussed.
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