Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 29, Issue 12, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/1361-6439/ab43e8
Keywords
noninvasive; humidity; respiratory rate; intergrated; microcantilever
Categories
Funding
- Zhejiang Provincial Natural Science Foundation of China [LZ19E050002]
- National Natural Science Foundation of China [51875521]
- Science Fund for Creative Research Groups of National Natural Science Foundation of China [51821093]
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Respiratory rate is a vital physiological signal in laboratory rodents research. This paper presents a noninvasive method based on resonant humidity sensor for monitoring respiratory rate of rats. The sensor is composed of an aluminum nitride (AlN) resonant microcantilever coated with graphene oxide (GO) film. The sensor shows high sensitivity and good repeatability. By combining the sensor with a control circuit, a closed-loop respiration measurement system is realized for fast response. The system can monitor respiratory rate of rats in real time by detecting relative humidity difference between exhaled and inhaled breath. The method has advantages of fast response, small size and low cost. Furthermore, the respiratory rate of rats can be noninvasively monitored by integrating the sensor with a face mask.
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