Nanofluidic peristaltic pumps made from silica thin films

We present theory for operation and experimental results for a nanoscale pump implemented in silica thin films that uses electrostatic actuation. The devices were implemented on silicon substrates using standard microfabrication recipes. Using pressures induced by capillary forces, the pressures exerted on pump membranes through electrostatic forces, and the approximate displacement per stroke we predict the pump speed operating the device over a range of frequencies and voltages. For membranes 100?nm thick, 170?V was required for pump actuation, providing exquisite control of pumping rates of less than 1 fl s(?1) per nanochannel.