Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 28, Issue 5, Pages 782-789Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2019.2926651
Keywords
Accelerometer; mode localization; common mode rejection; bias stability; noise floor; bandwidth
Categories
Funding
- Innovate UK
- Natural Environment Research Council
- EPSRC [EP/K000314/1, EP/L010917/1, EP/I019308/1, EP/N021614/1] Funding Source: UKRI
- NERC [NE/N012097/1] Funding Source: UKRI
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A novel differential configuration of a high-resolution mode-localized resonant SOI-MEMS accelerometer is presented in this paper. An effective maximum scale factor of 11/g and a bias-stability of 2.9 6 mu g is demonstrated. A minimum noise floor of 3 mu g/root Hz is shown for device operation in an optimum working region. A large bandwidth of 350Hz is reported and methods to electronically tune the working bandwidth are described. These results benchmark mode-localized accelerometers favourably with respect to other high-end low-g commercial MEMS accelerometers.
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