Reduced order modelling of the non-linear stiffness in MEMS resonators

We propose a simplified numerical technique to quantify the effects of non-linear stiffness in MEMS resonators and we validate our approach on a clamped-clamped beam, a softening Disk Ring Gyroscope (DRG) and a shallow arch showing internal resonance. We generate a Reduced Order Model (ROM) which is integrated with either a direct integration approach or a continuation technique with arc length control. Finally we compare and validate the results with a full FEM model.