Journal
INTEGRATED FERROELECTRICS
Volume 201, Issue 1, Pages 12-22Publisher
TAYLOR & FRANCIS LTD
DOI: 10.1080/10584587.2019.1668686
Keywords
PZT film; ultraviolet light (UV); poling process; dielectric constant
Funding
- Ministry of Science and Technology of the Republic of China [MOST 105-2221-E-027-103]
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Poling process is one of the widely used strategies to enhance the film properties during the manufacturing processes of ceramic film. A lab-made PbZrxTi1-xO3 (PZT) film by spin-coating on Ti substrate is presented. After heating treatments, the fabricated film was passed corona poling under ultraviolent (UV) light of various power. The characteristics of the PZT film have been evaluated by several instruments, such as X-ray diffractometer (XRD), scanning electron microscopy (SEM) and impedance analyzer. The results indicated that UV light would affect the orientation of crystallization, microstructure and grain size of PZT film surface during poling process under room temperature.
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