Journal
COATINGS
Volume 9, Issue 8, Pages -Publisher
MDPI
DOI: 10.3390/coatings9080500
Keywords
residual stress; Cr2O3 coating; Raman spectroscopy
Categories
Funding
- National Natural Science Foundation of China [11772227, 11772223]
- Science and Technology Special Commissioner Program of Tianjin [18JCTPJC64500]
- Tianjin Major Science and Technology Project of Military-Civil Integration [18ZXJMTG00050]
- Science Research and Development Foundation of Tianjin University of Technology and Education [KJ1809]
- University of Delaware Research Foundation
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Residual stress in coatings often affects the service performance of coatings, and the residual stresses in some local areas even lead to premature failure of coatings. In this work, we characterized the residual stress of local micro-areas of a nanocrystalline Cr2O3 coating deposited on a Si wafer through micro-Raman spectroscopy, including the depositional edge zone where the electrode was placed, the micro-area containing Cr2O3 macroparticles, and other micro-areas vulnerable to cracks. To accurately measure the thickness of the coating, we combined optical interferometry and direct measurement by a profilometer. The results indicate the existence of in-plane tensile residual stress on the Cr2O3 coating. In thick coatings, the residual stress is independent of the coating thickness and is stable between 0.55 GPa and 0.75 GPa. As the coating thickness is less than 0.8 mu m, the residual stress is directly related to the coating thickness. This in-plane tensile stress is considered as the origin of the observed microcrack, which can partially release the stress.
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