Journal
VACUUM
Volume 167, Issue -, Pages 1-5Publisher
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.vacuum.2019.05.035
Keywords
Indium oxide; Epitaxial growth; Crystal structure; MOCVD
Funding
- Shandong Province Natural Science Foundation [ZR2018BF026, ZR2018BF003]
- China Postdoctoral Science Foundation [2018M642694]
Ask authors/readers for more resources
High quality epitaxial indium oxide (In2O3) films were prepared on the a-plane sapphire [Al2O3 (110)] substrates at 570-690 degrees C by the metal-organic chemical vapor deposition (MOCVD) technique. The properties of structure, morphology and photoelectricity for the obtained films were studied at length. The film deposited at 650 degrees C showed the best crystalline quality with an out-of-plane epitaxial relationship of In2O3 (111)parallel to Al2O3 (110). This film also had the highest Hall mobility of 42 cm(2)V(-1)s(-1) with a lowest resistivity of 5 x 10(-3)Omega cm and a lowest carrier concentration of 3 x 10(19) cm(-3). All the samples possessed high average transparencies (over 83%) in the visible region and wide optical band gaps (similar to 3.70 eV). The In2O3 films with high crystalline quality as well as satisfactory photoelectrical characteristics can be extensively used in the manufacture of various semiconductor devices.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available