Journal
OPTICS EXPRESS
Volume 27, Issue 20, Pages 28679-28691Publisher
OPTICAL SOC AMER
DOI: 10.1364/OE.27.028679
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Funding
- National Research Foundation of Korea [NRF-2017R1A2B2009942]
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We present the design, fabrication, and characterization of a compound infrared microlens array having an ultrashort focal length and a hyperbolic profile that comprises a PDMS microlens array and a GRIN lens. A concave microlens mold was first fabricated on a fused silica substrate using femtosecond laser irradiation followed by a wet etching process, and a standard replication process was employed to fabricate a PDMS convex lens array. To shorten the focal length further and cut off the visible spectrum of light, a graded DLC/silicon coating, which functioned as a GRIN lens and a visible light cut-off filter, was additionally deposited using dual-beam pulsed laser deposition. The lenslet diameter was 6 mu m and the graded coating reduced the focal length from 4.5 to 2.9 mu m. (C) 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
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