Influence of partial pressure of oxygen on thermochromic performance of VO2 thin films by RF magnetron sputtering

In order to obtain a material with high solar modulation ability (Delta T-sol) and crystalline quality, VO2 films were prepared on quartz glass substrates using RF magnetron sputtering under various oxygen partial pressures. Their phase, surface, transmittance, and film sheet resistance properties were analyzed. As the oxygen partial pressure increased, the luminous transmittance (T-lum) of the film increased to as high as 55.6%, while the Delta T-sol first increased to a maximum of 10.8% and then decreased. This paper is a meaningful aid in the application of VO2 films to smart windows.