☆ 4.5 Article

Using a Plasma FIB Equipped with Xe, N2, O2 and Ar for Atom Probe Sample Preparation – Ion Implantation and Success Rates

MICROSCOPY AND MICROANALYSIS (2019)

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Journal

MICROSCOPY AND MICROANALYSIS
Volume 25, Issue S2, Pages 316-317

Publisher

Cambridge University Press (CUP)
DOI: 10.1017/s1431927619002319

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Categories

Materials Science, Multidisciplinary

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