Electronic and atomic structure studies of tin oxide layers using X-ray absorption near edge structure spectroscopy data modelling

The phase composition and local atomic and electronic structure of fin oxide layers have been studied by applying synchrotron X-ray absorption near edge structure spectroscopy. The linear combination analysis of the achieved results have been performed using first-principles calculated reference data for main fin-oxygen crystalline compounds. Our results suggest that proposed modelling approach successfully allows the reliable interpretation for Sn M-4,M-5 X-ray absorption near edge spectra caused by appropriate atomic structure reconstruction and phase transformation dynamics in thermally oxidized fin oxide layers produced by magnetron sputtering.