Journal
ACS APPLIED MATERIALS & INTERFACES
Volume 11, Issue 38, Pages 35376-35381Publisher
AMER CHEMICAL SOC
DOI: 10.1021/acsami.9b08761
Keywords
printed circuit boards; microfabrication; additive manufacturing; microcoils; microelectronics
Funding
- Gates Foundation [OPP1136638]
- Bill and Melinda Gates Foundation [OPP1136638] Funding Source: Bill and Melinda Gates Foundation
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The advances in micro/nanofabrication techniques have enabled miniaturization of printed circuit boards (PCBs) for various applications such as portable devices, smart sensors, and IoTs, to name a few. PCBs provide electrical connectivity between the components as well as mechanical support. Down-scaling of PCBs is crucial for miniaturization of large systems and devices. Currently, microtraces down to 25 mu m can be microfabricated with the current microfabrication processes at an industrial scale. In the present work, we report a new approach for microfabrication of PCBs with trace widths down to 3 mu m on commercially available PCB substrates. We used electroplating/electroetching, sputtering, and photolithography to achieve these fine trace sizes. The proposed fabrication technique can be used in microelectronics, system on chip, MEMS, and miniaturized circuits and systems in general.
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