Journal
ACS APPLIED MATERIALS & INTERFACES
Volume 11, Issue 39, Pages 36270-36277Publisher
AMER CHEMICAL SOC
DOI: 10.1021/acsami.9b12023
Keywords
2D MoS2 films; grain size; atomic layer deposition; molybdenum pentachloride; MoS2 growth mechanisms
Funding
- National Natural Science Foundation of China [51822501]
- Natural Science Funds for Distinguished Young Scholar of Jiangsu Province [BK20170023]
- Fundamental Research Funds for the Central Universities [3202006301, 3202006403]
- Qing Lan Project of Jiangsu Province
- International Foundation for Science, Stockholm, Sweden
- Organization for the Prohibition of Chemical Weapons, The Hague, Netherlands [F/4736-2]
- Top 6 High -Level Talents Program of Jiangsu Province [2017-GDZB-006]
- Natural Science Foundation of Jiangsu Province [BK20181274]
- Tribology Science Fund of the State Key Laboratory of Tribology [SKLTKF15A11]
- Open Research Fund of the State Key Laboratory of High Performance Complex Manufacturing, Central South University [Kfkt2016-11]
- Open Research Fund of the State Key Laboratory of Fire Science [HZ2017-KFO5]
- Open Research Fund of the State Key Laboratory of solid lubrication [LSL-1607]
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The synthesis of large-area and high-quality two-dimensional (2D) MoS2 is undoubtedly a significant challenge till now. In this work, an effective strategy for achieving 2D MoS2 with enlarged grain size by Ni-foam-based trickle flow atomic layer deposition (ALD) was suggested, by which MoS2 grain sizes up to 420 nm (monolayer sample) and 400 nm (five-layer sample) were obtained under the covering of 1 mm-thick Ni foam with a 2 mm gap from the substrate at 460 degrees C. In terms of specific ALD experiments, the Ni foam with a certain thickness placed on top of the substrate made the original precursor flow into a trickle-fluidization source flow, which decreased the nucleation density effectively. Thus, MoS2 with enlarged grain sizes were obtained based on the typical ALD mechanism of large-scale vertical growth under the action of steric hindrance after a planar parallel growth around the crystal nucleus. In addition, the Ni foam also achieved a stable temperature field by enhancing the heat transfer around the substrate and thus improved its crystallinity.
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