Journal
SURFACE REVIEW AND LETTERS
Volume 27, Issue 5, Pages -Publisher
WORLD SCIENTIFIC PUBL CO PTE LTD
DOI: 10.1142/S0218625X19501427
Keywords
Laser micromachining; silicon wafer; ablation; electrical properties; residual stress
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Funding
- National Key R&D Program of China [2018YFB1107700]
- National Program of Key Research in Additive Manufacturing and Laser Manufacturing of China [2016YFB1102503]
- National Key Basic Research Program of China [2015CB059900]
- National Natural Science Fund of China [51705013]
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This work presents the feasibility of picosecond laser micromachining of polysilicon wafer. Surface topography, microstructure and residual stress of both as-received surface and laser-machined surface were analyzed carefully by confocal microscope, scanning electron microscope and Raman microscope. Moreover, electrical properties of laser-machined wafer have been investigated to examine the effect of laser micromachining on Si substrate via characterizations of resistivity and I-V curves. The results show that the wafer thickness has been reduced up to 50%, while the depth of HAZ is less than 3 mu m, and compressive stress can be achieved at the laser-machined surface. Besides, laser micromachining causes little influence on electrical properties of wafer. This proofof-concept process has the potential application in mass production of integrated circuit industry.
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