Journal
NATURE CHEMISTRY
Volume 11, Issue 8, Pages 730-736Publisher
NATURE PUBLISHING GROUP
DOI: 10.1038/s41557-019-0290-1
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Funding
- National Key R&D Program of China [2016YFA0300903, 2016YFA0300804, 2015CB358600]
- NSFC [51522201, 11474006, 51722204]
- National Equipment Program of China [ZDYZ2015-1]
- Beijing Municipal Science & Technology Commission [Z181100004218006]
- Beijing Graphene Innovation Program [Z181100004818003, Z161100002116028]
- Bureau of Industry and Information Technology of Shenzhen [201901161512]
- Science Technology and Innovation Commission of Shenzhen Municipality [ZDSYS20170303165926217, JCYJ20170412152620376]
- Economic-Trade and Information Commission of Shenzhen Municipality, Guangdong Innovative and Entrepreneurial Research Team Program [2016ZT06D348]
- National Postdoctoral Program for Innovative Talents [BX201700014, BX20190016]
- Fundamental Research Funds for the Central Universities [ZYGX2016Z004]
- Institute for Basic Science of South Korea [IBS-R019-D1]
- UNIST (Ulsan National Institute of Science Technology) [1.180066.01]
- National Research Foundation of Korea [IBS-R019-D1-2019-A00] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
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Two-dimensional materials show a variety of promising properties, and controlling their growth is an important aspect for practical applications. To this end, active species such as hydrogen and oxygen are commonly introduced into reactors to promote the synthesis of two-dimensional materials with specific characteristics. Here, we demonstrate that fluorine can play a crucial role in tuning the growth kinetics of three representative two-dimensional materials (graphene, hexagonal boron nitride and WS2). When growing graphene by chemical vapour deposition on a copper foil, fluorine released from the decomposition of a metal fluoride placed near the copper foil greatly accelerates the growth of the graphene (up to a rate of similar to 200 mu m s(-1))Theoretical calculations show that it does so by promoting decomposition of the methane feedstock, which converts the endothermic growth process to an exothermic one. We further show that the presence of fluorine also accelerates the growth of two-dimensional hexagonal boron nitride and WS2.
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