Journal
JOURNAL OF SURFACE INVESTIGATION
Volume 13, Issue 3, Pages 562-565Publisher
PLEIADES PUBLISHING INC
DOI: 10.1134/S1027451019030339
Keywords
ion bombardment; sputtering; sputtering yield; amorphous target; computer simulation; program SRIM
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The computer simulation program SRIM, unlike other well-known programs (MARLOWE, TRIM.SP, etc.), predicts non-zero values of the sputtering yield in the case of glancing ion bombardment of smooth amorphous targets. To understand the reason for this and other differences, simulation of the sputtering of a germanium target bombarded with 0.1-10-keV ions is carried out using the OKSANA program. It is shown that SRIM insufficiently correctly simulates the initial stage of the sputtering process.
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