The effect of Ni pre-implantation on surface morphology and optical absorption properties of Ag nanoparticles embedded in SiO2

The effect of Ni ion fluence on Ag nucleation and particle growth was investigated by sequentially implantation of 60 keV Ni ions at fluences of 1 x 10(16), 5 x 10(16),1 x 10(17) ions/cm(2) and 70 keV Ag ions at a fluence of 5 x 10(16) ions/cm(2). Due to the modification of the deposition and accumulation process of Ag implants caused by Ni pre-implantation, the surface morphology, structures, and optical absorption properties of the Ag nanoparticles (NPs) depends strongly on the Ni fluences. UV-vis absorption spectroscopy study showed that the introducing of Ni atoms lead to intensity decrease in the Ag SPR band. Remarkable local concentration increase of Ag profiles appeared for the sample pre-implanted by Ni ions of 5.0 x 10(16) ions/cm(2). In particular, the AgNi alloy NPs with dual absorption peaks centered at 406 nm and 563 nm have been formed after 600 degrees C annealing in Ar atmosphere. However, at a low fluence of 1.0 x 10(16) ions/cm(2), only small increase of the local Ag concentration than the Ag ions singly implanted sample can be observed. At a high fluence of 1.0 x 10(17) ions/cm(2), lots Ag atoms are trapped close to the surface, which result in heavy sputtering loss of Ag atoms and the sublimation of Ag atoms after 600 degrees C annealing. (C) 2015 Elsevier B.V. All rights reserved.