Journal
JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA
Volume 241, Issue -, Pages -Publisher
ELSEVIER
DOI: 10.1016/j.elspec.2019.06.005
Keywords
Graphene; PMMA; Slow electron treatment; XPS; Raman spectroscopy
Categories
Funding
- People Programme (Marie Curie Actions) of the European Union's Seventh Framework Programme FP7/2007-2013/under REA grant [606988]
- TA CR [TE01020118]
- MEYS CR [LO1212]
- EC [CZ.1.05/2.1.00/01.0017]
- CAS [RVO:68081731]
- CEITEC Nano Research Infrastructure (MEYS CR, 2016-2019)
- Ministry of Education, Youth and Sports of the Czech Republic under project CEITEC 2020 [LQ1601]
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Two-dimensional materials, such as graphene, are usually prepared by chemical vapor deposition (CVD) on selected substrates, and their transfer is completed with a supporting layer, mostly polymethyl methacrylate (PMMA). Indeed, the PMMA has to be removed precisely to obtain the predicted superior properties of graphene after the transfer process. We demonstrate a new and effective technique to achieve a polymer-free CVD graphene - by utilizing low-energy electron irradiation in a scanning low-energy electron microscope (SLEEM). The influence of electron-landing energy on cleaning efficiency and graphene quality was observed by SLEEM, Raman spectroscopy (the presence of disorder D peak) and XPS (the deconvolution of the C 1s peak). After removing the absorbed molecules and polymer residues from the graphene surface with slow electrons, the individual graphene layers can also be distinguished outside ultra-high vacuum conditions in both the reflected and transmitted modes of a scanning low-energy (transmission) electron microscope.
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