Journal
APPLIED PHYSICS LETTERS
Volume 108, Issue 14, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.4945667
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Funding
- Ministry of Defense, Singapore
- National Science Foundation [DMR-1419807]
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We demonstrate an on-chip sensor for room-temperature detection of methane gas using a broad-band spiral chalcogenide glass waveguide coupled with off-chip laser and detector. The waveguide is fabricated using UV lithography patterning and lift-off after thermal evaporation. We measure the intensity change due to the presence and concentration of methane gas in the mid-infrared (MIR) range. This work provides an approach for broadband planar MIR gas sensing. (C) 2016 AIP Publishing LLC.
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