Growth of rocksalt-structured MgxZn1-xO (x > 0.5) films on MgO substrates and their deep-ultraviolet luminescence

Single-phase rocksalt-structured MgxZn1-xO (x > 0.5) alloy films were grown on MgO substrates using the mist chemical vapor deposition method. A specular surface with a step and terrace structure was obtained. The bandgap was tuned from 5.9 to 7.8 eV as x varied from 0.5 to 1. Deep ultraviolet cathodoluminescence, stemming from near band edge transitions, was observed for Mg0.57Zn0.43O in the 4.8-5.5 eV range, peaking at similar to 5.1 eV (similar to 240 nm) in the 12-100K range. (C) 2016 The Japan Society of Applied Physics