Journal
IEEE PHOTONICS TECHNOLOGY LETTERS
Volume 31, Issue 15, Pages 1209-1212Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LPT.2019.2922230
Keywords
Microdisk; subwavelength grating; sensor; silicon; mid-infrared
Funding
- National Science Fund for Distinguished Young Scholars [61725503]
- Zhejiang Provincial Natural Science Foundation [LZ18F050001]
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A silicon optical microdisk sensor for mid-infrared is proposed and demonstrated with subwavelength gratings (SWGs). This SWG microdisk is introduced to help obtain a high sensitivity. The bending radius is chosen as small as 6 mu m to obtain a free spectral range of 40.3 nm enabling a large dynamic range of measurements. With the present SWG microdisk sensor, NaCl aqueous solution with a varied concentration is measured and the sensitivity is about 390.4 nm/RIU, which is consistent with the theoretical prediction.
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