Journal
APPLIED PHYSICS EXPRESS
Volume 9, Issue 11, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.7567/APEX.9.111001
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Funding
- Advanced Characterization Nanotechnology Platform, Nanotechnology Platform Program
- JSPS KAKENHI [JP16H06423]
- Grants-in-Aid for Scientific Research [16H06423, 16H06415] Funding Source: KAKEN
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Three-dimensional (3D) lattice plane microstructures were investigated at local regions in an epitaxial AlN thick film grown on a trench-patterned AlN/sapphire template. A 3D reciprocal lattice space mapping technique combined with cross-sectional X-ray microdiffraction using an appropriate Bragg reflection quantitatively revealed the inhomogeneity of the lattice structures in the AlN film without loss of spatial resolution. The results showed a strong correlation of the lattice plane tilt/twist and variations with respect to the void configuration, the patterning structure of the template, and the dislocation morphologies confirmed by transmission electron microscopy. (C) 2016 The Japan Society of Applied Physics
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