Journal
APPLIED PHYSICS B-LASERS AND OPTICS
Volume 123, Issue 1, Pages -Publisher
SPRINGER
DOI: 10.1007/s00340-016-6595-5
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Funding
- National Centre for Research and Development, LIDER [LIDER/004/410/L-4/12/NCBR/2013]
- National Science Centre, Opus programme [UMO-2015/17/B/ST7/03718, UMO-2015/19/B/ST3/00435]
- Education, Audiovisual and Culture Executive Agency (EACEA) Erasmus Mundus Joint Doctorate Programme [2012-0033]
- European Union [654148]
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A compact, desktop size microscope, based on laser-plasma source and equipped with reflective condenser and diffractive Fresnel zone plate objective, operating in the extreme ultraviolet (EUV) region at the wavelength of 13.8 nm, was developed. The microscope is capable of capturing magnified images of objects with 95-nm full-pitch spatial resolution (48 nm 25-75% KE) and exposure time as low as a few seconds, combining reasonable acquisition conditions with stand-alone desktop footprint. Such EUV microscope can be regarded as a complementary imaging tool to already existing, well-established ones. Details about the microscope, characterization, resolution estimation and real sample images are presented and discussed.
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