Journal
ACS NANO
Volume 13, Issue 6, Pages 6782-6789Publisher
AMER CHEMICAL SOC
DOI: 10.1021/acsnano.9b01403
Keywords
UV-ozone treatment; adhesion enhancement; gold thin films; gold oxide; oxidized silicon substrates
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Funding
- Netherlands Center for Multiscale Catalytic Energy Conversion (MCEC)
- Netherlands Organisation for Scientific Research (NWO) Gravitation Programme - Ministry of Education, Culture and Science of the government of The Netherlands
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We found that continuous films of gold (Au) on oxidized silicon (SiO2) substrates, upon treatment with ultraviolet (UV)-ozone, exhibit strong adhesion to the SiO2 support. Importantly, the enhancement is independent of micro- or nanostructuring of such nanometer-thick films. Deposition of a second Au layer on top of the pretreated Au layer makes the adhesion stable for at least 5 months in environmental air. Using this treatment method enables us to large-scale fabricate various SiO2-supported Au structures at various thicknesses with dimensions spanning from a few hundreds of nanometers to a few micrometers, without the use of additional adhesion layers. We explain the observed adhesion improvement as polarization induced increased strength of Au delta-Si delta+ bonds at the Au-SiO2 interface due to the formation of a gold oxide monolayer on the Au surface by the UV-ozone treatment. Our simple and enabling method thus provides opportunities for patterning Au micro/nanostructures on SiO2 substrates without an intermediate metallic adhesion layer, which is critical for biosensing and nanophotonic applications.
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