Journal
ACOUSTICAL PHYSICS
Volume 65, Issue 3, Pages 253-262Publisher
PLEIADES PUBLISHING INC
DOI: 10.1134/S1063771019030059
Keywords
Finite element analysis; acoustic quasi-Lamb modes; thin piezoelectric films; gravimetric measurement; pressure sensor
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Using the finite element method, we have studied the Lamb modes characteristics propagation in c-tilted ZnO/SiC thin film composite membrane. Phase velocity dispersion curves, electromechanical coupling factors and the mass loading effect on the fundamental quasi Lamb modes are theoretically investigated for different rotating angle (0 degrees, degrees, 90 degrees), being the angle of rotation, and for different h(ZnO)/ values. To develop high performance pressure micro-sensor based on thin film piezoelectric ZnO on amorphous SiC (range 0.1 to 100 Pa) the anti-symmetric fundamental qA(0) mode phase shift is studied for pressure sensing.
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